PLATINUM SILICIDE OHMIC CONTACTS TO N-TYPE SILICON

被引：0
|
作者：
KIRCHER, CJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C238 / &
相关论文
共 50 条
  • [1] MAKING OHMIC CONTACTS IN N-TYPE SILICON
    BOICHENKO, BL
    [J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1964, (02) : 445 - +
  • [2] The fabrication of nickel silicide ohmic contacts to n-type 6H-silicon carbide
    Guo Hui
    Zhang Yi-Men
    Qiao Da-Yong
    Sun Lei
    Zhang Yu-Ming
    [J]. CHINESE PHYSICS, 2007, 16 (06): : 1753 - 1756
  • [3] PLATINUM SILICIDE OHMIC CONTACTS TO SHALLOW JUNCTIONS IN SILICON
    COHEN, SS
    PIACENTE, PA
    GILDENBLAT, G
    BROWN, DM
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) : 8856 - 8862
  • [4] Lanthanum and Lanthanum Silicide Contacts on N-Type Silicon
    Yu, Hao
    Wang, Lin-Lin
    Schaekers, Marc
    Everaert, Jean-Luc
    Jiang, Yu-Long
    Mocuta, Dan
    Horiguchi, Naoto
    Collaert, Nadine
    De Meyer, Kristin
    [J]. IEEE ELECTRON DEVICE LETTERS, 2017, 38 (07) : 843 - 846
  • [5] Ohmic contacts to n-type silicon-germanium
    Nelson, SF
    Jackson, TN
    [J]. APPLIED PHYSICS LETTERS, 1996, 69 (23) : 3563 - 3565
  • [6] Fabrication and characterization of nickel silicide ohmic contacts to n-type 4H Silicon Carbide
    Kuchuk, A.
    Kladko, V.
    Guziewicz, M.
    Piotrowska, A.
    Minikayev, R.
    Stonert, A.
    Ratajczak, R.
    [J]. PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY, 2008, 100
  • [7] Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
    Getto, R
    Freytag, J
    Kopnarski, M
    Oechsner, H
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 61-2 : 270 - 274
  • [8] OHMIC CONTACTS BETWEEN EVAPORATED ALUMINIUM AND N-TYPE SILICON
    NORTHROP, DC
    PUDDY, DC
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 94 (03): : 557 - &
  • [9] Tantalum carbide ohmic contacts to n-type silicon carbide
    Jang, T
    Porter, LM
    Rutsch, GWM
    Odekirk, B
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (25) : 3956 - 3958
  • [10] ALLOY BARRIER OHMIC CONTACTS FOR ALUMINUM TO N-TYPE SILICON
    MAY, JE
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (08) : C242 - &
12345