Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography

被引：83

作者：

Yin, Gung-Chian

Tang, Mau-Tsu

Song, Yen-Fang

Chen, Fu-Rong

Liang, Keng S.

Duewer, Frederick W.

Yun, Wenbing

Ko, Chen-Hao

Shieh, Han-Ping D.

机构：

[1] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan

[2] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan

[3] Natl Chiao Tung Univ, Display Inst, Hsinchu 300, Taiwan

[4] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan

[5] Xradia Inc, Concord, CA 94520 USA

[6] Yuan Ze Univ, Dept Elect Engn, Chungli 320, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 24期

关键词：

D O I：

10.1063/1.2211300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.

引用

页数：3

共 50 条

[21] X-ray phase tomography with a Talbot interferometer in combination with an X-ray imaging microscope
Momose, Atsushi
Takeda, Yoshihiro
Yashiro, Wataru
Takeuchi, Akihisa
Suzuki, Yoshio
9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2009, 186
[22] Phase contrast enhanced high resolution X-ray imaging and tomography of soft tissue
Jakubek, Jan
Granja, Carlos
Dammer, Jiri
Hanus, Robert
Holy, Tomas
Pospisil, Stanislav
Tykva, Richard
Uher, Josef
Vykydal, Zdenek
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 571 (1-2): : 69 - 72
[23] A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution
Rau, C.
Crecea, V.
Richter, C. -P.
Peterson, K. M.
Jemian, P. R.
Neuhaeusler, U.
Schneider, G.
Yu, X.
Braun, P. V.
Chiang, T. -C.
Robinson, I. K.
DEVELOPMENTS IN X-RAY TOMOGRAPHY V, 2006, 6318
[24] Contrast and resolution in imaging with a microfocus x-ray source
Pogany, A
Gao, D
Wilkins, SW
REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (07): : 2774 - 2782
[25] A full field transmission X-ray microscope as a tool for high-resolution magnetic imaging
Denbeaux, G
Fischer, P
Kusinski, G
Le Gros, M
Pearson, A
Attwood, D
IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) : 2764 - 2766
[26] Phase-Contrast Imaging and Tomography at 60 keV using a Conventional X-ray Tube
Donath, T.
Pfeiffer, F.
Bunk, O.
Groot, W.
Bednarzik, M.
Gruenzweig, C.
Hempel, E.
Popescu, S.
Hoheisel, M.
David, C.
DEVELOPMENTS IN X-RAY TOMOGRAPHY VI, 2008, 7078
[27] Quantitative phase imaging with a scanning transmission x-ray microscope
de Jonge, M. D.
Homberger, B.
Holzner, C.
Legnini, D.
Paterson, D.
McNulty, I.
Jacobsen, C.
Vogt, S.
PHYSICAL REVIEW LETTERS, 2008, 100 (16)
[28] Contrast-to-noise in X-ray differential phase contrast imaging
Engel, Klaus J.
Geller, D.
Koehler, T.
Martens, G.
Schusser, S.
Vogtmeier, G.
Roessl, E.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 648 : S202 - S207
[29] Helical x-ray differential phase contrast computed tomography
Qi, Zhihua
Theriault-Lauzier, Pascal
Bevins, Nicholas
Zambelli, Joseph
Li, Ke
Chen, Guang-Hong
MEDICAL IMAGING 2011: PHYSICS OF MEDICAL IMAGING, 2011, 7961
[30] Soft X-ray microscopy with a cryo scanning transmission X-ray microscope: II. Tomography
Wang, Y
Jacobsen, C
Maser, J
Osanna, A
JOURNAL OF MICROSCOPY-OXFORD, 2000, 197 : 80 - 93

← 1 2 3 4 5 →