Obtaining Thin Films Through Reactive Magnetron Sputtering. 2nd edition

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作者：
Zakharova, E. V.
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PHYSICS-USPEKHI | 2022年 / 65卷 / 05期
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O4 [物理学];
学科分类号：
0702 ;
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页码：S25 / S25
页数：1
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