Design and analysis of a novel six-degrees-of-freedom precision positioning table

被引：3
|
作者：
Fung, R-F [1 ,2 ]
Fan, C-T [1 ]
Lin, W-C [1 ]
机构：
[1] Natl Kaohsiung First Univ Sci & Technol, Dept Mech & Automat Engn, Kaohsiung 824, Taiwan
[2] Natl Kaohsiung First Univ Sci & Technol, Grad Inst Electroopt Engn, Kaohsiung 824, Taiwan
来源：
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE | 2009年 / 223卷 / 05期
关键词：
three-DOF; six-DOF; precision positioning tables; piezoelectric actuator; transfer matrix;
D O I：
10.1243/09544062JMES1284
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
The purpose of this study is to design and analyse a novel six-degrees-of-freedom (DOF) precision positioning table, which is assembled by two different kinds of three-DOF precision positioning tables: a plane-type three-DOF (X, Y, theta(z)) precision positioning table and a cylinder-type three-DOF (theta(x), theta(y), Z) one, and each table is driven by three piezoelectric actuators (PAs). In this paper, the Bouc-Wen model is employed to describe the hystereric phenomenon of the PAs. The transfer matrices with cross-coupling terms between the output displacements and input voltages are derived from the dynamic equations in the steady-state conditions. In order to obtain the best transfer matrix, experimental measurements of the whole six-DOF table are compared with those from the two individual three-DOF precision positioning tables. Finally, the transfer matrices with better performance for the two three-DOF tables and the novel six-DOF table are obtained.
引用
收藏
页码：1203 / 1212
页数：10
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