Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

被引：0

作者：

Evsikov, I. D. ^{[1
]}

Demin, G. D. ^{[1
]}

Glagolev, P. Yu ^{[1
]}

Djuzhev, N. A. ^{[1
]}

Makhiboroda, M. A. ^{[1
]}

Chkhalo, N., I ^{[2
]}

Salashchenko, N. N. ^{[2
]}

Kolos'ko, A. G. ^{[3
]}

Popov, E. O. ^{[3
]}

机构：

[1] Natl Res Univ Elect Technol MIET, R&D Ctr MEMSEC, Moscow, Russia

[2] RAS, Inst Phys Microstruct, Nizhnii Novgorod, Russia

[3] AF Ioffe Phys Tech Inst, St Petersburg, Russia

来源：

2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) | 2020年

关键词：

D O I：

10.1109/PowerMEMS49317.2019.20515806524

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper discusses the technological prospects for creating afield emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.

引用

页数：4

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