Dielectric measurement using non-contact microwave single probe for dielectric materials

被引：0

作者：

Kakemoto, Hirofumi ^{[1
]}

Nam, Song-Min ^{[1
]}

Wada, Satoshi ^{[1
]}

Tsurumi, Takaaki ^{[1
]}

机构：

[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Meguro Ku, Tokyo 1528552, Japan

来源：

JOURNAL OF ELECTROCERAMICS | 2006年 / 16卷 / 04期

关键词：

microwave; non-contact probe; reflection intensity; dielectric materials;

D O I：

10.1007/s10832-006-9919-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A high frequency dielectric measurement method was proposed using a non-contact probe. The microwave reflection intensity was measured for Al2O3 and SrTiO3 substrates at room temperature as a function of distance between sample and probe. The difference of reflection intensity for Al2O3 and SrTiO3 substrates was observed in the region where the distance of 0.2 mm between sample and probe, and it was caused from dielectric permittivities of samples. The reflection coefficient of sample was estimated in comparison with results of electromagnetic simulation. The reflection intensity for Al2O3 and SrTiO3 substrates was transformed to dielectric permittivity at reflection intensity minimum point.

引用

页码：561 / 564

页数：4

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