Dielectric measurement using non-contact microwave single probe for dielectric materials

被引：0
|
作者：
Kakemoto, Hirofumi [1 ]
Nam, Song-Min [1 ]
Wada, Satoshi [1 ]
Tsurumi, Takaaki [1 ]
机构：
[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Meguro Ku, Tokyo 1528552, Japan
来源：
JOURNAL OF ELECTROCERAMICS | 2006年 / 16卷 / 04期
关键词：
microwave; non-contact probe; reflection intensity; dielectric materials;
D O I：
10.1007/s10832-006-9919-8
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A high frequency dielectric measurement method was proposed using a non-contact probe. The microwave reflection intensity was measured for Al2O3 and SrTiO3 substrates at room temperature as a function of distance between sample and probe. The difference of reflection intensity for Al2O3 and SrTiO3 substrates was observed in the region where the distance of 0.2 mm between sample and probe, and it was caused from dielectric permittivities of samples. The reflection coefficient of sample was estimated in comparison with results of electromagnetic simulation. The reflection intensity for Al2O3 and SrTiO3 substrates was transformed to dielectric permittivity at reflection intensity minimum point.
引用
收藏
页码：561 / 564
页数：4
相关论文
共 50 条
  • [21] Non-contact measurement of dielectric constant for a nanometer-thick polymer film
    Park, G
    Hur, Y
    Kim, JH
    Kim, SH
    Keum, SR
    Koh, K
    ADVANCES IN NONDESTRUCTIVE EVALUATION, PT 1-3, 2004, 270-273 : 1143 - 1146
  • [22] Combination of voltage response method with non-contact electrostatic voltage measurement to determine the dielectric response of insulating materials
    Tamus, Z. A.
    ELECTROSTATICS 2019 AND DIELECTRICS 2019, 2019, 1322
  • [23] A non-contact laser probe in industrial measurement
    Li, Y
    Zhang, LX
    Zhang, SL
    Han, YM
    1999 INTERNATIONAL CONFERENCE ON INDUSTRIAL LASERS (IL'99), 1999, 3862 : 306 - 310
  • [24] Simultaneous non-contact precision imaging of microstructual and thickness variation in dielectric materials using terahertz energy
    Roth, D. J.
    Scebo, J. P.
    Winfree, William P.
    REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOL 27A AND 27B, 2008, 975 : 429 - +
  • [25] A Consideration of Sensitivity of Non-Contact PIM Measurement using a Coaxial Probe
    Oonishi, Kenichi
    Kuga, Nobuhiro
    APMC: 2008 ASIA PACIFIC MICROWAVE CONFERENCE (APMC 2008), VOLS 1-5, 2008, : 669 - 672
  • [26] Contact Free Electrical Conductivity Characterization Probe Using a Microwave Dielectric Resonator
    Djebbi, Roua
    Delhote, Nicolas
    Verdeyme, Serge
    Tantot, Olivier
    Pereiras, Elodie
    Boyer, Laurence
    Durand, Olivier
    2024 54TH EUROPEAN MICROWAVE CONFERENCE, EUMC 2024, 2024, : 421 - 424
  • [27] Reflection intensity measurement for dielectric material using a microwave single probe and its electromagnetic field analysis
    Kakemoto, H
    Wada, S
    Tsurumi, T
    ELECTROCERAMICS IN JAPAN VIII, 2006, 301 : 125 - 128
  • [28] The development of the non-contact electrical leakage property measurement system for the high-K dielectric materials on DRAM capacitors
    Yang, Yusin
    Lee, Byung Sug
    Lee, Misung
    Jun, Chung Sam
    Kim, Tae Sung
    2006 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 2006, : 7 - +
  • [29] Evanescent microwave probe study on dielectric properties of materials
    Cheng, HF
    Chen, YC
    Lin, IN
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2006, 26 (10-11) : 1801 - 1805
  • [30] THE MEASUREMENT OF THE DIELECTRIC-CONSTANT USING THE MICROWAVE DIELECTRIC RESONATOR
    BAICAN, R
    REVUE ROUMAINE DE PHYSIQUE, 1981, 26 (06): : 597 - 600
12345