共 50 条
- [2] Microelectromechanical systems (MEMS) [J]. 1997 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 3, 1997, : 9 - 43
- [5] Microelectromechanical systems (MEMS) tutorial [J]. INTERNATIONAL TEST CONFERENCE 1998, PROCEEDINGS, 1998, : 432 - 441
- [6] Packaging and microelectromechanical systems (MEMS) [J]. ICEPT: 2007 8TH INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING TECHNOLOGY, PROCEEDINGS, 2007, : 23 - +
- [8] Reliability of microelectromechanical systems (MEMS) [J]. RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS, 2001, 4558 : 197 - 205
- [9] Development of a model for predicting dry stiction in microelectromechanical systems (MEMS) [J]. RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VI, 2007, 6463
- [10] A DESCRIPTIVE MODEL OF THE CURRENT MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVELOPMENT PROCESS [J]. ICED 09 - THE 17TH INTERNATIONAL CONFERENCE ON ENGINEERING DESIGN, VOL 1: DESIGN PROCESSES, 2009, : 607 - +