Experimental investigation on the machining characteristics of single-crystal SiC sawing with the fixed diamond wire

被引:51
|
作者
Huang, Hui [1 ]
Zhang, Yuxing [1 ]
Xu, Xipeng [1 ]
机构
[1] Huaqiao Univ, Inst Mfg Engn, Xiamen 361021, Fujian Province, Peoples R China
基金
中国国家自然科学基金;
关键词
Single-crystal SiC; Fixed diamond wire; Sawing; Material remove mechanism; Surface profile; SILICON-CARBIDE; HIGH-SPEED; CERAMICS; REMOVAL; WAFERS; MECHANISMS;
D O I
10.1007/s00170-015-7250-8
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Machining characteristics and surface profiles were systematically investigated during the fixed abrasive diamond wire sawing of single-crystal silicon carbide (SiC). The material removal mechanism involved in the sawing was explored. The scanning electron micrographs examination and the result of surface roughness of the sawn surface and the analysis of the force and specific sawing energy involved in the sawing process indicated that the material removal of single-crystal SiC sawing with fixed diamond wire was dominated by brittle fracture. However, more ploughing striations were obtained in the sawn surface under high wire speed. The sawn surface of the single-crystal SiC indicated the periodical waviness was caused by the reciprocating movement of the fixed diamond wire. The specific sawing energy showed a rapid increase with the decrease of the material removal volume per length of wire when it was below a critical value.
引用
收藏
页码:955 / 965
页数:11
相关论文
共 50 条
  • [41] Experimental study on precision sawing of KDP crystal with diamond wire saw assisted with water dissolution
    Teng, Xiao-Ji
    Gao, Hang
    Wang, Xu
    Chen, Yu-Chuan
    Rengong Jingti Xuebao/Journal of Synthetic Crystals, 2015, 44 (06): : 1438 - 1442
  • [42] Investigation on the sawing temperature in ultrasonic vibration assisted diamond wire sawing monocrystalline silicon
    Wang, Yan
    Song, Li-Xing
    Liu, Jian-Guo
    Wang, Rui
    Zhao, Bo-Cheng
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 135 (135)
  • [43] Optimizing the diamond wire sawing of polycrystalline silicon: An experimental approach
    Costa, Erick Cardoso
    van Bellen, Bruno
    Werner, Marcos Odivan
    de Sousa, Pedro Cordula
    Xavier, Fabio Antonio
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2025, 185
  • [44] Experimental and Theoretical Investigations on Diamond Wire Sawing for a NdFeB Magnet
    Liu, Jia
    Zhang, Zhenyu
    Wan, Shengzuo
    Wu, Bin
    Feng, Junyuan
    Zhang, Tianyu
    Zhou, Chunchen
    MATERIALS, 2022, 15 (09)
  • [45] A BASIC STUDY ON VIBRATION MULTI-WIRE SAWING USING WIRE FIXED DIAMOND GRAINS
    ISHIKAWA, K
    SUWABE, H
    BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1987, 21 (03): : 214 - 216
  • [46] Contouring of polished single-crystal silicon plates by wire electrical discharge machining
    Takino, Hideo
    Ichinohe, Toshimitsu
    Tanimoto, Katsunori
    Nomura, Kazushi
    Kunieda, Masanori
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2007, 31 (04): : 358 - 363
  • [47] Investigation of excitonic recombination in single-crystal diamond with cathodoluminescence spectroscopy
    Chen, Yanan
    Jin, Peng
    Zhou, Guangdi
    Feng, Mengyang
    Fu, Fangbin
    Wu, Ju
    Wu, Zhangu
    JOURNAL OF LUMINESCENCE, 2020, 226
  • [48] Coolant effects on tool wear in machining single-crystal silicon with diamond tools
    Ohta, Tsutomu
    Yan, Jiwang
    Kodera, Sunao
    Yajima, Shuuma
    Horikawa, Naoyuki
    Takahashi, Youichi
    Kuriyagawa, Tsunemoto
    Key Engineering Materials, 2009, 389-390 : 144 - 150
  • [49] Coolant effects on tool wear in machining single-crystal silicon with diamond tools
    Ohta, Tsutomu
    Yan, Jiwang
    Kodera, Sunao
    Yajima, Shuuma
    Horikawa, Naoyuki
    Takahashi, Youichi
    Kuriyagawa, Tsunemoto
    ADVANCES IN ABRASIVE TECHNOLOGY XI, 2009, 389-390 : 144 - +
  • [50] STUDY ON MACHINING CHARACTERISTICS OF DIAMOND ABRASIVE WIRE
    ITO, S
    MURATA, R
    JOURNAL OF MECHANICAL ENGINEERING LABORATORY, 1987, 41 (05): : 236 - 244