Experimental investigation on the machining characteristics of single-crystal SiC sawing with the fixed diamond wire

被引:51
|
作者
Huang, Hui [1 ]
Zhang, Yuxing [1 ]
Xu, Xipeng [1 ]
机构
[1] Huaqiao Univ, Inst Mfg Engn, Xiamen 361021, Fujian Province, Peoples R China
基金
中国国家自然科学基金;
关键词
Single-crystal SiC; Fixed diamond wire; Sawing; Material remove mechanism; Surface profile; SILICON-CARBIDE; HIGH-SPEED; CERAMICS; REMOVAL; WAFERS; MECHANISMS;
D O I
10.1007/s00170-015-7250-8
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Machining characteristics and surface profiles were systematically investigated during the fixed abrasive diamond wire sawing of single-crystal silicon carbide (SiC). The material removal mechanism involved in the sawing was explored. The scanning electron micrographs examination and the result of surface roughness of the sawn surface and the analysis of the force and specific sawing energy involved in the sawing process indicated that the material removal of single-crystal SiC sawing with fixed diamond wire was dominated by brittle fracture. However, more ploughing striations were obtained in the sawn surface under high wire speed. The sawn surface of the single-crystal SiC indicated the periodical waviness was caused by the reciprocating movement of the fixed diamond wire. The specific sawing energy showed a rapid increase with the decrease of the material removal volume per length of wire when it was below a critical value.
引用
收藏
页码:955 / 965
页数:11
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