Study of GaN-Based LEDs With Hybrid SiO2 Microsphere/Nanosphere AntiReflection Coating as a Passivation Layer by a Rapid Convection Deposition

被引:15
|
作者
Hsu, Chi-Hsiang [1 ]
Chan, Yi-Chun [1 ]
Chen, Wei-Cheng [1 ]
Chang, Ching-Hong [1 ,4 ]
Liou, Jian-Kai [1 ]
Cheng, Shiou-Ying [2 ]
Guo, Der-Feng [3 ]
Liu, Wen-Chau [1 ]
机构
[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
[2] Natl Ilan Univ, Dept Elect Engn, Yilan 260, Taiwan
[3] Chinese Air Force Acad, Dept Elect Engn, Kaohsiung 820, Taiwan
[4] Chaoyang Univ Technol, Dept Comp Sci & Informat Engn, Taichung, Taiwan
关键词
Antireflection coating; GaN; light-emitting diode (LED); microsphere/nanosphere; rapid convection deposition (RCD); LIGHT-EMITTING-DIODES; EXTRACTION EFFICIENCY; JUNCTION-TEMPERATURE; SURFACE; PERFORMANCE; FABRICATION; IMPROVEMENT;
D O I
10.1109/TED.2017.2657659
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A hybrid SiO2 micro/nanospheres antireflection coating, deposited by a rapid convection deposition, acting as a passivation layer of GaN-based light-emitting diodes (LEDs) is studied in this paper. Since the critical angle could be enlarged by antireflection coating, Fresnel reflection could be reduced. In addition, due to the roughened surface of hybrid SiO2 microsphere/nanosphere antireflection coating, the scattering effect could be increased. Thus, the light extraction efficiency could be further enhanced. As compared with a conventional LED (device A), at 20 mA, the studied device C exhibits 18.7% enhancement in light output power without any degradation of electrical properties. Reduced leakage current could also be achieved. Therefore, the use of hybrid SiO2 microsphere/nanosphere antireflection coating could effectively improve the performance of GaN-based LEDs.
引用
收藏
页码:1134 / 1139
页数:6
相关论文
共 42 条
  • [1] Improvement of external extraction efficiency in GaN-based LEDs by SiO2 nanosphere lithography
    Hsieh, Min-Yann
    Wang, Cheng-Yin
    Chen, Liang-Yi
    Lin, Tzu-Pu
    Ke, Min-Yung
    Cheng, Yun-Wei
    Yu, Yi-Cheng
    Chen, Cheng Pin
    Yeh, Dong-Ming
    Lu, Chih-Feng
    Huang, Chi-Feng
    Yang, C. C.
    Huang, Jian Jang
    IEEE ELECTRON DEVICE LETTERS, 2008, 29 (07) : 658 - 660
  • [2] Influence of SiO2 or SiNx Passivation on the Electrical Properties of GaN-based Nanorod LEDs
    Yu, Zhi-Guo
    Zhao, Li-Xia
    Wei, Xue-Cheng
    Wang, Jun-Xi
    Li, Jin-Min
    2013 10TH CHINA INTERNATIONAL FORUM ON SOLID STATE LIGHTING (CHINASSL), 2013, : 291 - 294
  • [3] The impacts of SiO2 atomic-layer-deposited passivation layer thickness on GaN-based green micro-LEDs
    Deng, Youcai
    Chen, Jinlan
    Li, Saijun
    Huang, He
    Liu, Zhong
    Yan, Zijun
    Lai, Shouqiang
    Zheng, Lijie
    Yang, Tianzhi
    Chen, Zhong
    Wu, Tingzhu
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2024, 39 (04)
  • [4] GaN-Based LEDs With Omnidirectional Metal Underneath an Insulating SiO2 Layer
    Lin, Nan-Ming
    Shei, Shih-Chang
    Chang, Shoou-Jinn
    Zeng, Xu-Feng
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2012, 24 (10) : 815 - 817
  • [5] Influences of Microhole Depth and SiO2 Nanoparticle/Microsphere Passivation Layer on the Performance of GaN-Based Light-Emitting Diodes
    Wang, Zih-Fong
    Liu, Wen-Chau
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (10) : 4211 - 4215
  • [6] Characteristics of GaN-Based LEDs With Hybrid Microhole Arrays and SiO2 Microspheres/Nanoparticles Structures
    Liou, Jian-Kai
    Chan, Yi-Chun
    Chen, Wei-Cheng
    Chang, Ching-Hong
    Chen, Chun-Yen
    Tsai, Jung-Hui
    Liu, Wen-Chau
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (07) : 2854 - 2858
  • [7] Performance Improvement of GaN-Based Light-Emitting Diodes With a Microhole Array, 45° Sidewalls, and a SiO2 Nanoparticle/Microsphere Passivation Layer
    Chang, Ching-Hong
    Lee, Yu-Lin
    Wang, Zih-Fong
    Liu, Rong-Chau
    Tsai, Jung-Hui
    Liu, Wen-Chau
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (01) : 505 - 511
  • [8] Study on Antireflection SiO2 Coatings Fabricated by Layer-by-Layer Deposition
    WANG Cong
    HU Qingwei
    FANG Pengfei
    HE Chunqing
    Wuhan University Journal of Natural Sciences, 2013, 18 (03) : 213 - 218
  • [9] High-efficiency GaN-based LED with patterned SiO2 passivation layer and discontinuous current block layer
    Deng, Jie
    Guo, Weiling
    Tai, Jianpeng
    Lu, Zehua
    Li, Mengmei
    Yu, Qinghua
    2019 16TH CHINA INTERNATIONAL FORUM ON SOLID STATE LIGHTING & 2019 INTERNATIONAL FORUM ON WIDE BANDGAP SEMICONDUCTORS CHINA (SSLCHINA: IFWS), 2019, : 90 - 92
  • [10] Efficiency Improvement of GaN-Based LEDs With SiO2 Microrod Array and Textured Sidewalls
    Kao, Chien-Chih
    Su, Yan-Kuin
    Lin, Chuing-Liang
    Chen, Jian-Jhong
    IEEE ELECTRON DEVICE LETTERS, 2010, 31 (01) : 35 - 37