Design and fabrication of arrays of nanoelectromechanical resonators for parallel detection of biomolecular interactions

被引：0
|
作者：
Bergaud, C [1 ]
Cocheteau, E [1 ]
Guirardel, M [1 ]
Nicu, L [1 ]
Belier, B [1 ]
机构：
[1] CNRS, LAAS, F-31077 Toulouse 4, France
来源：
ETFA 2001: 8TH IEEE INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, VOL 2, PROCEEDINGS | 2001年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The recent achievements of surface and bulk micro and nanomachining techniques combined with the fabrication techniques of integrated circuits have led to the development of miniaturized sensors and actuators exhibiting unprecedented sensitivity. This work is dedicated to the design and fabrication of nanoelectromechanical resonators for parallel detection of biomolecular interactions. The aim is to obtain piezoresistive nanoresonators with a high mechanical quality factor and a high force sensitivity to detect the mass loading induced by specific biomolecular interactions (ligand-receptor, antibody-antigen, hybridization of complementary DNA strands).
引用
收藏
页码：305 / 308
页数：4
相关论文
共 50 条
  • [1] Fabrication and application of silicon nanowire transistor arrays for biomolecular detection
    Vu, X. T.
    GhoshMoulick, R.
    Eschermann, J. F.
    Stockmann, R.
    Offenhaeusser, A.
    Ingebrandt, S.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2010, 144 (02): : 354 - 360
  • [2] Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
    Nelson-Fitzpatrick, N.
    Westra, K.
    Li, P.
    McColman, S.
    Wilding, N.
    Evoy, S.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (06): : 2769 - 2771
  • [3] Suspended microchannel resonators for biomolecular detection
    Burg, TP
    Manalis, SR
    [J]. APPLIED PHYSICS LETTERS, 2003, 83 (13) : 2698 - 2700
  • [4] Graphene nanoelectromechanical resonators for the detection of modulated terahertz radiation
    Svintsov, D.
    Leiman, V. G.
    Ryzhii, V.
    Otsuji, T.
    Shur, M. S.
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (50)
  • [5] Dynamical response of nanomechanical resonators to biomolecular interactions
    Eom, Kilho
    Kwon, Tae Yun
    Yoon, Dae Sung
    Lee, Hong Lim
    Kim, Tae Song
    [J]. PHYSICAL REVIEW B, 2007, 76 (11)
  • [6] Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators
    Piller, Markus
    Hiesberger, Johannes
    Wistrela, Elisabeth
    Martini, Paolo
    Luhmann, Niklas
    Schmid, Silvan
    [J]. IEEE SENSORS JOURNAL, 2023, 23 (02) : 1066 - 1071
  • [7] Fabrication of highly oriented nanocluster arrays by biomolecular templating
    Mertig, M
    Kirsch, R
    Pompe, W
    Engelhardt, H
    [J]. EUROPEAN PHYSICAL JOURNAL D, 1999, 9 (1-4): : 45 - 48
  • [8] Fabrication of highly oriented nanocluster arrays by biomolecular templating
    M. Mertig
    R. Kirsch
    W. Pompe
    H. Engelhardt
    [J]. The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics, 1999, 9 : 45 - 48
  • [9] LARGE-SCALE ARRAYS OF TUNABLE MONOLAYER MoS2 NANOELECTROMECHANICAL RESONATORS
    Liu, Zuheng
    Wang, Luming
    Zhang, Pengcheng
    Xie, Maosong
    Jia, Yueyang
    Chen, Ying
    Jia, Hao
    Wang, Zenghui
    Yang, Rui
    [J]. 2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 281 - 284
  • [10] Design, synthesis and fabrication of a biomolecular nanovalve
    Reiss, Brian
    Auciello, Orlando
    Ocola, Leonidas E.
    Firestone, Millicent A.
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 233
12345