Design and fabrication of arrays of nanoelectromechanical resonators for parallel detection of biomolecular interactions

被引：0
|
作者：
Bergaud, C [1 ]
Cocheteau, E [1 ]
Guirardel, M [1 ]
Nicu, L [1 ]
Belier, B [1 ]
机构：
[1] CNRS, LAAS, F-31077 Toulouse 4, France
来源：
ETFA 2001: 8TH IEEE INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, VOL 2, PROCEEDINGS | 2001年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The recent achievements of surface and bulk micro and nanomachining techniques combined with the fabrication techniques of integrated circuits have led to the development of miniaturized sensors and actuators exhibiting unprecedented sensitivity. This work is dedicated to the design and fabrication of nanoelectromechanical resonators for parallel detection of biomolecular interactions. The aim is to obtain piezoresistive nanoresonators with a high mechanical quality factor and a high force sensitivity to detect the mass loading induced by specific biomolecular interactions (ligand-receptor, antibody-antigen, hybridization of complementary DNA strands).
引用
收藏
页码：305 / 308
页数：4
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