(Ba,Sr)RuO3 bottom electrode deposited by liqud delivery metalorganic chemical vapor deposition for (Ba,Sr)TiO3 high dielectric

被引：0
|
作者：
Choi, ES [1 ]
Shin, WC [1 ]
Yoon, SG [1 ]
机构：
[1] Chungnam Natl Univ, Dept Mat Engn, Taejon 305764, South Korea
来源：
FERROELECTRICS | 2002年 / 271卷
关键词：
LDMOCVD; deposition temperature; oxygen flow rate; resistivity; roughness;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Conducting perovskite oxide, (Ba,Sr)RuO3 (BSR), which has many advantages for (Ba,Sr)TiO3 (BST) due to their similarity in crystal structure, lattice constant and chemical composition, was prepared on n-type Si (100) by liquid delivery metalorganic chemical vapor deposition (LDMOCVD). The deposition characteristics of BSR were controlled by gas-phase mass-transfer in these experiments. The BSR films deposited at 500degreesC and oxygen flow rate of 100 sccm (standard cc/min) showed a average roughness of 22Angstrom and resistivity of 810 muOmega-cm. The resistivity of BSR films for variation of oxygen flow rate showed a close relationship with the roughness of films.
引用
收藏
页码：1701 / 1706
页数：6
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