(Ba,Sr)RuO3 bottom electrode deposited by liqud delivery metalorganic chemical vapor deposition for (Ba,Sr)TiO3 high dielectric

被引：0
|
作者：
Choi, ES [1 ]
Shin, WC [1 ]
Yoon, SG [1 ]
机构：
[1] Chungnam Natl Univ, Dept Mat Engn, Taejon 305764, South Korea
来源：
FERROELECTRICS | 2002年 / 271卷
关键词：
LDMOCVD; deposition temperature; oxygen flow rate; resistivity; roughness;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Conducting perovskite oxide, (Ba,Sr)RuO3 (BSR), which has many advantages for (Ba,Sr)TiO3 (BST) due to their similarity in crystal structure, lattice constant and chemical composition, was prepared on n-type Si (100) by liquid delivery metalorganic chemical vapor deposition (LDMOCVD). The deposition characteristics of BSR were controlled by gas-phase mass-transfer in these experiments. The BSR films deposited at 500degreesC and oxygen flow rate of 100 sccm (standard cc/min) showed a average roughness of 22Angstrom and resistivity of 810 muOmega-cm. The resistivity of BSR films for variation of oxygen flow rate showed a close relationship with the roughness of films.
引用
收藏
页码：1701 / 1706
页数：6
相关论文
共 50 条
  • [1] Evaluation of tailored electrode (Ba,Sr)RuO3 for (Ba,Sr)TiO3
    Choi, DK
    Kim, BS
    Son, SY
    Oh, SH
    Park, KW
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (06) : 3347 - 3351
  • [2] Metal organic chemical vapor deposition of (Ba,Sr)RuO3 conductive oxide film for (Ba,Sr)TiO3
    Choi, DK
    Hong, DH
    Kang, JS
    Kim, HC
    Kim, YB
    Kim, YH
    FERROELECTRICS, 2002, 271 : 1689 - 1694
  • [3] Metal Organic Chemical Vapor Deposition of (Ba, Sr)RuO3 oxide electrode for (Ba, Sr)TiO3 using nozzle type injector
    Park, Jeong-Hee
    Kang, Joong-Seo
    Kim, Young-Bae
    Choi, Duck-Kyun
    Han, Young-Ki
    Yang, Doo-Young
    Oh, Ki-Young
    Ferroelectrics, 2001, 260 (01) : 105 - 111
  • [4] Metal organic chemical vapor deposition of (Ba,Sr)RuO3 oxide electrode for (Ba,Sr)TiO3 using nozzle type injector
    Park, JH
    Kang, JS
    Kim, YB
    Choi, DK
    Han, YK
    Yang, DY
    Oh, KY
    FERROELECTRICS, 2001, 260 (1-4) : 449 - 455
  • [5] Electrical properties of (Ba,Sr)TiO3 on (Sr,Ca)RuO3 electrode
    Son, SY
    Kim, BS
    Oh, SH
    Choi, DK
    Yoo, CY
    Lee, SI
    Dai, ZR
    Ohuchi, FS
    JOURNAL OF MATERIALS SCIENCE, 1999, 34 (24) : 6115 - 6119
  • [6] Electrical properties of (Ba,Sr)TiO3 on (Sr,Ca)RuO3 electrode
    Seung Young Son
    Boum Seock Kim
    Se Hoon Oh
    Duck Kyun Choi
    Cha Young Yoo
    Sang In Lee
    Z. R. Dai
    Fumio S. Ohuchi
    Journal of Materials Science, 1999, 34 : 6115 - 6119
  • [7] Improvements in tunability of (Ba0.5Sr0.5)TiO3 thin films by use of metalorganic chemical vapor deposited (Ba,Sr)RuO3 interfacial layers
    Jeon, YA
    Choi, ES
    Seo, TS
    Yoon, SG
    APPLIED PHYSICS LETTERS, 2001, 79 (07) : 1012 - 1014
  • [8] Effects of (Ba, Sr)TiO3 film thickness on electrical properties of (Ba, Sr)TiO3/(Ba, Sr)RuO3 capacitor
    Oh, SH
    Park, KW
    Park, JH
    Kim, BS
    Choi, DK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (04): : 1923 - 1928
  • [9] Structural stability of metalorganic chemical vapor deposited (Ba,Sr)RuO3 electrodes for integration of high dielectric memory devices
    Choi, ES
    Choi, YS
    Park, CM
    Shin, WC
    Yoon, SG
    INTEGRATED FERROELECTRICS, 2001, 37 (1-4) : 341 - 350
  • [10] Effect of forming gas anneal on the properties of (Ba,Sr)RuO3 and (Ba,Sr)TiO3
    Kim, YB
    Park, JH
    Hong, DH
    Choi, DK
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2002, 41 (6A): : L629 - L631
12345