Preparation of highly oriented KTN/SrTiO3(111), KTN/SrTiO3(100) thin films by sol-gel method

Highly oriented perovskite KTN/SrTiO3(100) thin films were prepared by Sol-Gel method from KOCOCH3, Ta(OC2H5)(5) and Nb(OC2H5)(5). The crystallization process of KTN thin films on SrTiO3 substrate was studied by XRD. Some technical parameters such as the solution concentration, viscosity, catalyst, heat treatment temperature, heating and cooling rate, and O-2 flow were determined by the experiments, at the same time, the lattice constant, thermal expansion coefficient and chemical stability of substrate which influenced the structure and quality of KTN films were also discussed.