Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

被引：12
|
作者：
Kanda, T
Kurosawa, MK
Higuchi, T
机构：
[1] Univ Tokyo, Dept Precis Machinery Engn, Grad Sch Engn, Bunkyo Ku, Tokyo 1138656, Japan
[2] Tokyo Inst Technol, Dept Adv Appl Elect, Midori Ku, Yokohama, Kanagawa 2268502, Japan
来源：
ULTRASONICS | 2002年 / 40卷 / 1-8期
关键词：
touch probe sensor; PZT thin film; hydrothermal method; surface profile measurement;
D O I：
10.1016/S0041-624X(02)00091-4
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：61 / 65
页数：5
相关论文
共 50 条
  • [31] Enhancement of Sensitivity on Miniaturized Thin-film Magnetoimpedance with Ellipsoidal Element
    Kikuchi, Hiroaki
    Oe, Suguru
    Uetake, Hiroaki
    Yabukami, Shin
    Nakai, Tomoo
    Hashi, Shuichiro
    Ishiyama, Kazushi
    20TH INTERNATIONAL CONFERENCE ON MAGNETISM, ICM 2015, 2015, 75 : 1271 - 1278
  • [32] Microactuators of deformable mirror using PZT thin film
    Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
    Nami Jishu yu Jingmi Gongcheng, 2008, 2 (142-145):
  • [33] Miniaturized high-frequency carrier-type thin-film magnetic field sensor with high sensitivity
    Kikuchi, H
    Ajiro, N
    Yamaguchi, M
    Arai, KI
    Takezawa, A
    IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) : 2042 - 2044
  • [34] Ultrasonic micro array sensor using piezoelectric PZT thin film and resonant frequency timing by poling
    Yamashita, K
    Murakami, H
    Fukunaga, T
    Okuyama, M
    Aoyagi, S
    Suzuki, Y
    ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, 2002, : 487 - 490
  • [35] High-directivity array of ultrasonic micro sensor using PZT thin film on Si diaphragm
    Yamashita, K
    Katata, H
    Okuyama, N
    Miyoshi, H
    Kato, G
    Aoyagi, S
    Suzuki, Y
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 114 - 117
  • [36] Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
    Duval, Fabrice F. C.
    Wilson, Stephen A.
    Ensell, Graham
    Evanno, Nicolas M. P.
    Cain, Markys G.
    Whatmore, Roger W.
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 133 (01) : 35 - 44
  • [37] Cylindrical micro touch sensor with a piezoelectric thin film for microbial separation
    Arai, F
    Motoo, K
    Kwon, PGR
    Fukuda, T
    Ichikawa, A
    Katsuragi, T
    ROBOTICA, 2005, 23 (23) : 441 - 448
  • [38] Force sensing model of capacitive hybrid touch sensor using thin-film force sensor and its evaluation
    Young-Tae Kim
    Jong-Ho Kim
    Dong-Ki Kim
    Young-Ha Kwon
    International Journal of Precision Engineering and Manufacturing, 2015, 16 : 981 - 988
  • [39] Force sensing model of capacitive hybrid touch sensor using thin-film force sensor and its evaluation
    Kim, Young-Tae
    Kim, Jong-Ho
    Kim, Dong-Ki
    Kwon, Young-Ha
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2015, 16 (05) : 981 - 988
  • [40] Miniaturized three-dimensional touch trigger probe using optical fibre bundle
    Oiwa, T
    Tanaka, T
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2005, 16 (08) : 1574 - 1581
12345