共 50 条
- [1] Novel touch sensor with piezoelectric thin film for microbial separation 2003 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-3, PROCEEDINGS, 2003, : 306 - 311
- [3] High sensitive micro touch sensor with piezoelectric thin film for micro pipetting works under microscope 2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS, 2004, : 1352 - 1357
- [5] A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor SENSORS, 2014, 14 (12): : 22199 - 22207
- [9] Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film 2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), 2013,
- [10] Piezoelectric polyvinylidene fluoride thin film as monitoring sensor 6TH BIOMEDICAL ENGINEERING INTERNATIONAL CONFERENCE (BMEICON 2013), 2013,