A thin-film piezoelectric pressure sensor

被引：7

作者：

Kazaryan, AA

机构：

来源：

关键词：

Physical Chemistry; Analytical Chemistry; Experimental Investigation; Pressure Sensor; Piezoelectric Pressure Sensor;

D O I：

10.1023/A:1020068006447

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The results of a theoretical and experimental investigation of thin-film piezoelectric pressure sensors are presented.

引用

页码：515 / 518

页数：4

共 50 条

[1] A Thin-Film Piezoelectric Pressure Sensor
A. A. Kazaryan
[J]. Measurement Techniques, 2002, 45 : 515 - 518
[2] A Thin-Film Capacitance Pressure Sensor
A. A. Kazaryan
E. V. Strel’tsov
[J]. Measurement Techniques, 2015, 57 : 1403 - 1410
[3] A Thin-Film Capacitance Pressure Sensor
Kazaryan, A. A.
Strel'tsov, E. V.
[J]. MEASUREMENT TECHNIQUES, 2015, 57 (12) : 1403 - 1410
[4] OBSERVATION OF THIN-FILM MAGNETOSTRICTION USING A PIEZOELECTRIC SENSOR
SHIN, YD
LEE, YH
RHEE, JR
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) : 3025 - 3027
[5] Vacuum pressure thermal thin-film sensor
Berlicki, T.M.
Osadnik, S.J.
Prociów, E.L.
[J]. Vacuum, 1999, 53 (03): : 373 - 376
[6] Vacuum pressure thermal thin-film sensor
Berlicki, TM
Osadnik, SJ
Prociów, EL
[J]. VACUUM, 1999, 53 (3-4) : 373 - 376
[7] A fast thin-film electret pressure sensor
Ahtiainen, Simo T.
Olkkonen, Hannu
Tiitta, Markku
[J]. Recent Patents on Electrical Engineering, 2010, 3 (01) : 45 - 50
[8] A New Thin-film Piezoelectric Sensor for Easuring Methane Gas
Tong, Minming
Li, Ying
Tang, Shoufeng
Han, Fei
[J]. MATERIAL SCIENCE AND ENGINEERING TECHNOLOGY, 2012, 462 : 619 - +
[9] Thin-film piezoelectric MEMS
Eom, Chang-Beom
Trolier-McKinstry, Susan
[J]. MRS BULLETIN, 2012, 37 (11) : 1007 - 1021
[10] Thin-film piezoelectric MEMS
Chang Beom Eom
Susan Trolier-McKinstry
[J]. MRS Bulletin, 2012, 37 : 1007 - 1017