In this paper, recent progress of GaN high electron mobility transistors (HEMTs) will be addressed. GaN HEMTs have been developed mainly for power amplifiers and power conversion units. For mass production, suppression of trapping phenomena, such as current collapse was required. Surface structures and GaN buffer layers are key features for controlling trap formation, resulting in long reliability. Drift phenomena which are critical characteristics for power amplifier were also investigated in detail. For power conversion, normally-off technology is essential. In this study, we developed the insulated-gate structure using atomic layer deposition.
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Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Zhou, Qi
Yang, Shu
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Hong Kong Univ Sci & Technol HKUST, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Yang, Shu
Chen, Wanjun
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Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Chen, Wanjun
Zhang, Bo
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Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Zhang, Bo
Feng, Zhihong
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Hebei Semicond Res Inst, Sci & Technol ASIC Lab, Shijiazhuang 050051, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Feng, Zhihong
Cai, Shujun
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Hebei Semicond Res Inst, Sci & Technol ASIC Lab, Shijiazhuang 050051, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
Cai, Shujun
Chen, Kevin J.
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Hong Kong Univ Sci & Technol HKUST, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R ChinaUniv Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China