Photoluminescence and Raman spectroscopy in hydrogenated carbon films

被引:179
|
作者
Marchon, B
Gui, J
Grannen, K
Rauch, GC
Ager, JW
Silva, SRP
Robertson, J
机构
[1] Seagate Recording Media Group, Fremont, CA 94539
关键词
D O I
10.1109/20.617873
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
a-C:H films prepared by DC-magnetron sputtering in an H-2:Ar mixture exhibit strong photoluminescence (PL) peaks superimposed upon the Raman scattering spectrum. PL becomes observable at a hydrogen content of ca. 34%, and increases exponentially thereafter, driven by the progressive saturation of carbon dangling bonds. In this %H range, hardness and elastic modulus decrease and CSS durability reaches an optimum. The Raman G peak position is very sensitive to deposition temperature (shift of 0.1 cm(-1)/C-0) and was found to correlate with the sp(3)/sp(2) bonding ratio as measured by EELS, and therefore can also be used as a predictor of carbon tribological performance.
引用
收藏
页码:3148 / 3150
页数:3
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