Lasers light the way to ever-shrinking chips

被引：0
|
作者：
Lerner, EJ
机构：
来源：
LASER FOCUS WORLD | 2002年 / 38卷 / 07期
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D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Krypton fluoride, argon fluoride, and fluorine lasers mark the steps toward smaller linewidths as lithography makes faster and more complex chips.
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页码：91 / +
页数：5
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