Lasers light the way to ever-shrinking chips

被引：0

作者：

Lerner, EJ

机构：

来源：

LASER FOCUS WORLD | 2002年 / 38卷 / 07期

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Krypton fluoride, argon fluoride, and fluorine lasers mark the steps toward smaller linewidths as lithography makes faster and more complex chips.

引用

页码：91 / +

页数：5

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