Capture and emission time map to investigate the positive VTH shift in p-GaN power HEMTs

被引:9
|
作者
Modolo, N. [1 ]
Fregolent, M. [1 ]
Masin, F. [1 ]
Benato, A. [1 ]
Bettini, A. [1 ]
Buffolo, M. [1 ]
De Santi, C. [1 ]
Borga, M. [2 ]
Posthuma, N. [2 ]
Bakeroot, B. [3 ,4 ]
Decoutere, S. [2 ]
Vogrig, D. [1 ]
Neviani, A. [1 ]
Meneghesso, G. [1 ]
Zanoni, E. [1 ]
Meneghini, M. [1 ]
机构
[1] Univ Padua, Dept Informat Engn, Via Gradenigo 6 B, I-35131 Padua, Italy
[2] imec, Kapeldreef 75, Heverlee, Belgium
[3] imec, CMST, Technologiepk 126, Ghent, Belgium
[4] Univ Ghent, Technologiepk 126, Ghent, Belgium
基金
欧盟地平线“2020”;
关键词
Charge trapping; p-GaN power HEMTs; PBTI; Capture and emission time map; Threshold voltage shift; THRESHOLD VOLTAGE; MODEL;
D O I
10.1016/j.microrel.2022.114708
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, for the first time the threshold voltage instability of 100 V rated p-GaN power HEMTs is investi-gated by combined pulsed-IV measurements and capture and emission time (CET) MAPS, by investigating a remarkable time window of 9 decades, from 1 mu s to 1000 s. After a statistical analysis to demonstrate the repeatability of the experimental results, pulsed IV characterization revealed the existence of a non-monotonic Delta VTH shift, as a function of the (positive) gate stress bias. To gain further insight on the positive threshold shift, CET MAP analysis has been carried out at different temperatures: the results provide relevant insight on the physical properties of the population of traps responsible for the VTH shift, most likely located at the AlGaN/GaN interface. In addition, the related capture and emission time-constant as a function of temperature are investi-gated, thus allowing to extract the activation energies for the trapping and de-trapping processes, and to propose a model for the trapping mechanisms.
引用
收藏
页数:5
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