Influence of deposition pressure on the structural, optical and electrical properties of Sb2Se3 thin films grown by RF magnetron sputtering

被引：0
|
作者：
Zhao, Fei [1 ]
Tao, Jiahua [1 ]
Guo, Yixin [1 ]
Ma, Chuanhe [1 ]
Jiang, Jinchun [1 ,2 ]
Chu, Junhao [1 ,2 ,3 ]
机构：
[1] East China Normal Univ, Dept Elect Engn, Key Lab Polar Mat & Devices, Minist Educ, Shanghai 200241, Peoples R China
[2] Shanghai Ctr Photovolta, Shanghai 201201, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
来源：
OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS | 2019年 / 13卷 / 5-6期
基金：
美国国家科学基金会;
关键词：
Sb2Se3 thin films; Magnetron sputtering; Cry stallinity; Electrical mobility; Optical band gap; LARGE-SCALE;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, Sb2Se3 thin films were deposited on quartz substrates by radio frequency (RF) magnetron sputtering at different deposition pressures. The structural, optical and electrical properties of the Sb2Se3 films were investigated by XRD, Raman, XPS, SEM, Hall Effect and UV-Vis measurements. With optimized deposition pressure of 0.5 Pa, the fabricated Sb2Se3 film has the highest crystallinity, the most stable valence of Se2- and Sb3+, the maximum mobility (21.54 cm(2) V-1 s(-1)) and the suitable optical band gap (1.33 eV). This study provides a guideline to prepare Sb2Se3 film for photovoltaics.
引用
收藏
页码：359 / 363
页数：5
相关论文
共 50 条
  • [21] Effect of oxygen mixing percentage on structural, optical and electrical properties of ZnTiO3 thin films grown by RF magnetron sputtering
    H. Srinivasa Varaprasad
    P. V. Sridevi
    M. Satya Anuradha
    Srinivas Pattipaka
    D. Pamu
    Journal of Materials Science: Materials in Electronics, 2022, 33 : 9368 - 9379
  • [22] Effect of deposition time on structural, electrical and optical properties of Aluminium doped ZnO thin films by RF magnetron sputtering
    Tondare, Rajkumar S.
    Shivaraj, B. W.
    Narasimhamurthy, H. N.
    Krishna, M.
    Subramanyam, T. K.
    MATERIALS TODAY-PROCEEDINGS, 2018, 5 (01) : 2710 - 2715
  • [23] OPTICAL-PROPERTIES OF SB2SE3 THIN-FILMS
    ELSHAIR, HT
    IBRAHIM, AM
    ELWAHABB, EA
    AFIFY, MA
    ELSALAM, FA
    VACUUM, 1991, 42 (14) : 911 - 914
  • [24] Structural and electrical properties of cerium dioxide films grown by RF magnetron sputtering
    Tsai, WC
    Tseng, TY
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1997, 8 (05) : 313 - 320
  • [25] Structural and electrical properties of cerium dioxide films grown by RF magnetron sputtering
    WEN-CHOU TSAI
    TSEUNG-YUEN TSENG
    Journal of Materials Science: Materials in Electronics, 1997, 8 : 313 - 320
  • [26] Thickness dependences of the structural optical, and electrical properties of Cu2 Se thin films grown by using DC magnetron sputtering
    Ahn, Heejin
    Um, Youngho
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2014, 64 (10) : 1600 - 1604
  • [27] Thickness dependences of the structural optical, and electrical properties of Cu2 Se thin films grown by using DC magnetron sputtering
    Heejin Ahn
    Youngho Um
    Journal of the Korean Physical Society, 2014, 64 : 1600 - 1604
  • [28] Structural, electrical and optical properties of ZnO:AlF3 thin films deposited by RF magnetron sputtering
    Lin, Tien-Chai
    Huang, Wen-Chang
    Liu, Chin-Hung
    Chang, Shy-Chou
    APPLIED SURFACE SCIENCE, 2012, 258 (07) : 3302 - 3308
  • [29] Influence of oxygen partial pressure on the structural, optical and electrochromic properties of NiO thin films grown by magnetron sputtering
    Öcal Tuna
    Ali Kemal Mak
    Osman Öztürk
    Mevlüt Karabulut
    Applied Physics A, 2023, 129
  • [30] Influence of oxygen partial pressure on the structural, optical and electrochromic properties of NiO thin films grown by magnetron sputtering
    Tuna, Ocal
    Mak, Ali Kemal
    Ozturk, Osman
    Karabulut, Mevlut
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2023, 129 (12):
12345