Coagulation of dust grains in the plasma of an RF discharge in argon

被引：20

作者：

Mankelevich, Yu. A. ^{[1
]}

Olevanov, M. A. ^{[1
]}

Pal', A. F. ^{[1
]}

Rakhimova, T. V. ^{[1
]}

Ryabinkin, A. N. ^{[1
]}

Serov, A. O. ^{[1
]}

Filippov, A. V. ^{[2
]}

机构：

[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119899, Russia

[2] Troitsk Inst Innovat & Fus Res, Troitsk 142190, Moscow Oblast, Russia

来源：

PLASMA PHYSICS REPORTS | 2009年 / 35卷 / 03期

基金：

俄罗斯基础研究基金会;

关键词：

LOW-TEMPERATURE PLASMA; PARTICLE FORMATION; SILANE PLASMAS;

D O I：

10.1134/S1063780X09030027

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Results are presented from experimental studies of coagulation of dust grains of different sizes injected into a low-temperature plasma of an RF discharge in argon. A theoretical model describing the formation of dust clusters in a low-temperature plasma is developed and applied to interpret the results of experiments on the coagulation of dust grains having large negative charges. The grain size at which coagulation under the given plasma conditions is possible is estimated using the developed theory. The theoretical results are compared with the experimental data.

引用

页码：191 / 199

页数：9

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