A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

被引：7

作者：

Tan, Qiulin ^{[1
,2
,3
]}

Yang, Mingliang ^{[1
,2
]}

Luo, Tao ^{[2
]}

Liu, Wei ^{[1
]}

Li, Chao ^{[1
]}

Xue, Chenyang ^{[2
]}

Liu, Jun ^{[1
,2
]}

Zhang, Wendong ^{[1
]}

Xiong, Jijun ^{[1
,2
]}

机构：

[1] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China

[2] North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China

[3] Chongqing Univ, Natl Key Lab Fundamental Sci Micro Nanodevice & S, Chongqing 400044, Peoples R China

来源：

JOURNAL OF SENSORS | 2014年 / 2014卷

关键词：

WIRELESS;

D O I：

10.1155/2014/431503

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600 degrees C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.

引用

页数：6

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