A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

被引：7
|
作者：
Tan, Qiulin [1 ,2 ,3 ]
Yang, Mingliang [1 ,2 ]
Luo, Tao [2 ]
Liu, Wei [1 ]
Li, Chao [1 ]
Xue, Chenyang [2 ]
Liu, Jun [1 ,2 ]
Zhang, Wendong [1 ]
Xiong, Jijun [1 ,2 ]
机构：
[1] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
[2] North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China
[3] Chongqing Univ, Natl Key Lab Fundamental Sci Micro Nanodevice & S, Chongqing 400044, Peoples R China
来源：
JOURNAL OF SENSORS | 2014年 / 2014卷
关键词：
WIRELESS;
D O I：
10.1155/2014/431503
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600 degrees C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.
引用
收藏
页数：6
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