Observation of voltage contrast in non-contact resonant mode atomic force microscopy

被引：5
|
作者：
Girard, P
Solal, GC
Belaidi, S
机构：
[1] Lab. d'Anal. Interfaces Nanophysique, (LAIN) URA CNRS D 1881 Univ. M., F 34095 Montpellier Cedex 5, Place E. Bataillon
来源：
MICROELECTRONIC ENGINEERING | 1996年 / 31卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(95)00344-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we present a new possibility for local voltage detection based on atomic force microscopy (AFM). We use the non contact resonant mode which is sensitive to local force gradients and then those related to electrostatics. The principle is given, experiments illustrate this effect both on metal and on an Integrated Circuit pad buried under insulator. The sensitivity of the method is discussed.
引用
收藏
页码：215 / 225
页数：11
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