Observation of voltage contrast in non-contact resonant mode atomic force microscopy

被引：5
|
作者：
Girard, P
Solal, GC
Belaidi, S
机构：
[1] Lab. d'Anal. Interfaces Nanophysique, (LAIN) URA CNRS D 1881 Univ. M., F 34095 Montpellier Cedex 5, Place E. Bataillon
来源：
MICROELECTRONIC ENGINEERING | 1996年 / 31卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(95)00344-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we present a new possibility for local voltage detection based on atomic force microscopy (AFM). We use the non contact resonant mode which is sensitive to local force gradients and then those related to electrostatics. The principle is given, experiments illustrate this effect both on metal and on an Integrated Circuit pad buried under insulator. The sensitivity of the method is discussed.
引用
收藏
页码：215 / 225
页数：11
相关论文
共 50 条
  • [1] Contact and non-contact mode imaging by atomic force microscopy
    Morita, S
    Fujisawa, S
    Kishi, E
    Ohta, M
    Ueyama, H
    Sugawara, Y
    [J]. THIN SOLID FILMS, 1996, 273 (1-2) : 138 - 142
  • [2] Thermally driven non-contact atomic force microscopy
    Gannepalli, A
    Sebastian, A
    Cleveland, J
    Salapaka, M
    [J]. APPLIED PHYSICS LETTERS, 2005, 87 (11)
  • [3] Contrast inversion in non-contact atomic force microscopy imaging of C60 molecules
    Loske, Felix
    Rahe, Philipp
    Kuehnle, Angelika
    [J]. NANOTECHNOLOGY, 2009, 20 (26)
  • [4] Simulation of the observability of atomic defects by atomic force microscopy in contact and non-contact modes
    Sokolov, IY
    Henderson, GS
    [J]. SURFACE SCIENCE, 2002, 499 (2-3) : 135 - 140
  • [5] Physical dissipation mechanisms in non-contact atomic force microscopy
    Trevethan, T
    Kantorovich, L
    [J]. NANOTECHNOLOGY, 2004, 15 (02) : S44 - S48
  • [6] Atomic contrast on a point defect on CaF2(111) imaged by non-contact atomic force microscopy
    Fujii, Shintaro
    Fujihira, Masamichi
    [J]. NANOTECHNOLOGY, 2007, 18 (08)
  • [7] Dielectric constants by multifrequency non-contact atomic force microscopy
    Kumar, Bharat
    Bonvallet, Joseph C.
    Crittenden, Scott R.
    [J]. NANOTECHNOLOGY, 2012, 23 (02)
  • [8] Models of atomic scale contrast in dissipation images of binary ionic surfaces in non-contact atomic force microscopy
    Trevethan, T
    Kantorovich, L
    [J]. NANOTECHNOLOGY, 2006, 17 (07) : S205 - S212
  • [9] Non-contact non-resonant atomic force microscopy method for measurements of highly mobile molecules and nanoparticles
    Ukraintsev, Egor
    Rezek, Bohuslav
    [J]. ULTRAMICROSCOPY, 2023, 253
  • [10] Control of bistability in non-contact mode atomic force microscopy using modulated time delay
    Ilham Kirrou
    Mohamed Belhaq
    [J]. Nonlinear Dynamics, 2015, 81 : 607 - 619
12345