Thickness-dependent optical properties of yttrium fluoride ultrathin films in the visible band

被引:1
|
作者
Shan, Yao [1 ]
Liu, Pian [1 ]
Chen, Yao [1 ]
Tu, Huatian [1 ]
Zhang, Haotian [1 ]
Zheng, Yuxiang [1 ]
Zhang, Rongjun [1 ]
Wang, Songyou [1 ]
Chen, Liangyao [1 ]
机构
[1] Fudan Univ, Shanghai Engn Res Ctr Ultra Precis Opt Mfg, Key Lab Micro & Nano Photon Struct, Dept Opt Sci & Engn,Minist Educ, Shanghai 200433, Peoples R China
基金
中国国家自然科学基金;
关键词
YF3; THIN-FILMS; SPECTROSCOPIC ELLIPSOMETRY; SCANNING ELLIPSOMETER; STRUCTURAL-PROPERTIES; VOID FRACTION; DEPOSITION; INTERFACE; POLARIZER; COATINGS; DESIGN;
D O I
10.1364/OME.398536
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Yttrium fluoride (YF3) thin films with a thickness range of 10.8-1079.0 nm were prepared by electron beam evaporation. Spectroscopic ellipsometry was used to study the thickness-dependent optical properties of YF3 ultrathin films in the 300-820 nm wavelength range. With increasing thicknesses, the refractive indices of the intrinsic YF3 films increase slightly and approach that of bulk YF3 due to the decrease of void fractions. The effective refractive indices of the YF3 films also increase with increasing thicknesses, due to the surface and interface effects besides the contribution of decrease of void fractions. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:3306 / 3314
页数:9
相关论文
共 50 条
  • [41] Thickness-dependent properties of ultrathin bismuth and antimony chalcogenide films formed by physical vapor deposition and their application in thermoelectric generators
    Andzane, J.
    Felsharuk, A.
    Sarakovskis, A.
    Malinovskis, U.
    Kauranens, E.
    Bechelany, M.
    Niherysh, K. A.
    Komissarov, I. V.
    Erts, D.
    [J]. MATERIALS TODAY ENERGY, 2021, 19
  • [42] Thickness-dependent properties of FeTaN thin films deposited on flexible substrate
    Liu, Z.W.
    Liu, Y.
    Yan, L.
    Tan, C.Y.
    Ong, C.K.
    [J]. Journal of Applied Physics, 1600, 99 (04):
  • [43] SURFACE-CHEMISTRY AND THICKNESS-DEPENDENT OPTICAL-PROPERTIES OF FILMS OF OXIDIZED NI/CR ON POLYIMIDE
    DRAEGER, NA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06): : 2936 - 2940
  • [44] Thickness-dependent properties of FeTaN thin films deposited on flexible substrate
    Liu, ZW
    Liu, Y
    Yan, L
    Tan, CY
    Ong, CK
    [J]. JOURNAL OF APPLIED PHYSICS, 2006, 99 (04)
  • [45] Elastic and orbital effects on thickness-dependent properties of manganite thin films
    Infante, I. C.
    Sanchez, F.
    Fontcuberta, J.
    Wojcik, M.
    Jedryka, E.
    Estrade, S.
    Peiro, F.
    Arbiol, J.
    Laukhin, V.
    Espinos, J. P.
    [J]. PHYSICAL REVIEW B, 2007, 76 (22)
  • [46] Thickness-dependent lattice relaxation and the associated optical properties of ZnO epitaxial films grown on Si (111)
    Liu, W. -R.
    Lin, B. H.
    Kuo, C. C.
    Lee, W. C.
    Hong, M.
    Kwo, J.
    Hsu, C. -H.
    Hsieh, W. F.
    [J]. CRYSTENGCOMM, 2012, 14 (23): : 8103 - 8109
  • [47] Thickness-dependent electronic structure in ultrathin LaNiO3 films under tensile strain
    Yoo, Hyang Keun
    Hyun, Seung Ill
    Chang, Young Jun
    Moreschini, Luca
    Sohn, Chang Hee
    Kim, Hyeong-Do
    Bostwick, Aaron
    Rotenberg, Eli
    Shim, Ji Hoon
    Noh, Tae Won
    [J]. PHYSICAL REVIEW B, 2016, 93 (03)
  • [48] Thickness-dependent thermoelectric properties of ultrathin polymer film on self-assembled monolayers
    Chen, Xiaomin
    Jin, Jiaoying
    Sun, Shiyuan
    Xiao, He
    Wang, Lei
    Liu, Danqing
    [J]. APPLIED PHYSICS LETTERS, 2024, 124 (08)
  • [49] Thickness-dependent optical and structural properties of polytetrafluoroethylene/zinc oxide films by radio frequency magnetron sputtering
    Tripathi, Shilpa
    De, Rajnarayan
    Rao, Kompalli D.
    Haque, Sheikh M.
    Goud, Bhujagouni K.
    Prathap, Chillakala
    Misal, Jitendra S.
    Patidar, Manju M.
    Ganesan, Vedachalaiyer
    Sahoo, Naba K.
    [J]. ADVANCES IN POLYMER TECHNOLOGY, 2018, 37 (08) : 2774 - 2787
  • [50] Thickness-dependent metal-insulator transition in epitaxial SrRuO3 ultrathin films
    Shen, Xuan
    Qiu, Xiangbiao
    Su, Dong
    Zhou, Shengqiang
    Li, Aidong
    Wu, Di
    [J]. JOURNAL OF APPLIED PHYSICS, 2015, 117 (01)