Optical Fiber Fabry-Perot Pressure Sensor Based on a Polymer Structure

被引：18

作者：

Dai, Lihua ^{[1
,2
]}

Wang, Ming ^{[1
]}

Cai, Dongyan ^{[1
]}

Rong, Hua ^{[1
]}

Zhu, Jiali ^{[1
]}

Jia, Sheng ^{[1
]}

You, Jingjing ^{[1
]}

机构：

[1] Nanjing Normal Univ, Sch Phys Sci & Technol, Jiangsu Key Lab Optoelect Technol, Nanjing 210097, Jiangsu, Peoples R China

[2] Suzhou Inst Ind Technol, Suzhou 215104, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2013年 / 25卷 / 24期

基金：

中国国家自然科学基金;

关键词：

Fabry-Perot interferometer; fiber optic sensor; lithography; SU-8; polymer; WAVE-GUIDES; SU-8; TIP;

D O I：

10.1109/LPT.2013.2287289

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel optical MEMS pressure sensor with a SU-8 microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry-Perot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation. The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity, sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.

引用

页码：2505 / 2508

页数：4

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