Miniature High Sensitivity Diaphragm-based Optical Fiber Fabry-Perot Pressure Sensor

An optical fiber pressure sensor based on Fabry-Perot interference has been proposed in this paper. The sensor's outside diameter is only 1.8mm. Chemical etching, laser bonding and epoxy-fixed are required in the sensor fabrication process. Different pressure sensitivities can be obtained with different diaphragm thickness. The maximum pressure sensitivity is up to 1052nm/MPa in our experiments. The temperature dependence of this sensor is about 0.145nm/degrees C. The advantages of this kind of sensor are high pressure sensitivity, low temperature dependence, low optical loss, ease of fabrication and low cost. This sensor is immune to electromagnetic interference and corrosion resistant.