Rigorous microlens design using vector electromagnetic method combined with simulated annealing optimization

被引：6

作者：

Zuo, Hai-Jie ^{[1
]}

Zhang, Jiang-Yong ^{[1
]}

Ying, Ying-Lei ^{[1
]}

Zhang, Bao-Ping ^{[1
]}

Hou, Zhi-Jin ^{[2
]}

Chen, Hong-Xu ^{[2
]}

Si, Jun-Jie ^{[2
]}

机构：

[1] Xiamen Univ, Dept Elect Engn, Lab Micronano Optoelect, Xiamen 361005, Fujian, Peoples R China

[2] Luoyang Optoelectro Technol Dev Ctr, Luoyang 471099, Henan, Peoples R China

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 10期

关键词：

DIFFRACTIVE MICROLENSES; ARRAY;

D O I：

10.1364/OE.22.012653

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, finite-aperture diffractive optical element with its critical dimension smaller than illumination wavelength is modeled and optimized using an integrated method. This method employs rigorous analysis model based on Finite Difference Time Domain (FDTD), and simulated annealing (SA) global search algorithm. Numerical results reveal that the diffraction efficiency of the 8-step microlens quickly climbs to its global optimum along with the optimization process, which manifests its global search ability. The design algorithm and implementation are discussed in details. Considering its time consuming efficiency and global search ability, our method provides valuable reference value in practical multistep microlens design. (C) 2014 Optical Society of America

引用

页码：12653 / 12658

页数：6

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