Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

被引：23

作者：

Hashimoto, Ayako ^{[1
]}

Shimojo, Masayuki ^{[2
,3
]}

Mitsuishi, Kazutaka ^{[2
,4
]}

Takeguchi, Masaki ^{[2
,5
]}

机构：

[1] Natl Inst Mat Sci, Int Ctr Young Scientists, Tsukuba, Ibaraki 3050047, Japan

[2] Natl Inst Mat Sci, High Voltage Electron Microscopy Stn, Tsukuba, Ibaraki 3050003, Japan

[3] Saitama Inst Technol, Adv Sci Res Lab, Fukaya 3690293, Japan

[4] Natl Inst Mat Sci, Quantum Dot Res Ctr, Tsukuba, Ibaraki 3050003, Japan

[5] Natl Inst Mat Sci, Adv Nanocharacterizat Ctr, Tsukuba, Ibaraki 3050003, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 106卷 / 08期

基金：

日本学术振兴会;

关键词：

ATOMS;

D O I：

10.1063/1.3225103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM. (C) 2009 American Institute of Physics. [doi:10.1063/1.3225103]

引用

页数：3

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