Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

被引：23
|
作者：
Hashimoto, Ayako [1 ]
Shimojo, Masayuki [2 ,3 ]
Mitsuishi, Kazutaka [2 ,4 ]
Takeguchi, Masaki [2 ,5 ]
机构：
[1] Natl Inst Mat Sci, Int Ctr Young Scientists, Tsukuba, Ibaraki 3050047, Japan
[2] Natl Inst Mat Sci, High Voltage Electron Microscopy Stn, Tsukuba, Ibaraki 3050003, Japan
[3] Saitama Inst Technol, Adv Sci Res Lab, Fukaya 3690293, Japan
[4] Natl Inst Mat Sci, Quantum Dot Res Ctr, Tsukuba, Ibaraki 3050003, Japan
[5] Natl Inst Mat Sci, Adv Nanocharacterizat Ctr, Tsukuba, Ibaraki 3050003, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 2009年 / 106卷 / 08期
基金：
日本学术振兴会;
关键词：
ATOMS;
D O I：
10.1063/1.3225103
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM. (C) 2009 American Institute of Physics. [doi:10.1063/1.3225103]
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页数：3
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