Investigation on Properties of Molybdenum Thin Films for CIGS Solar Cells

被引：3

作者：

Cho, Sang Hyun ^{[1
,2
]}

Kim, Hyo Jin ^{[2
,3
]}

Lee, Sung Ho ^{[2
]}

Woo, Jae Ik ^{[2
]}

Song, Kyu Ho ^{[2
]}

Song, Pung Keun ^{[1
]}

机构：

[1] Pusan Natl Univ, Dept Mat Sci & Engn, Pusan 609735, South Korea

[2] Nano Convergence Pract Applicat Ctr, Nano Convergence Res Team, Taegu 704801, South Korea

[3] Kyungpook Natl Univ, Dept Polymer Sci, Taegu 702701, South Korea

来源：

JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2014年 / 9卷 / 02期

关键词：

Mo (Molybdenum) Back Contact; CIGS; (Cu; (In; Ga) Se-2) Solar Cell; Post-Annealing; In-Situ High Temperature XRD (HT-XRD); Magnetron Sputtering; DOPED-INDIUM-OXIDE; BACK CONTACT; FABRICATION;

D O I：

10.1166/jno.2014.1560

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Molybdenum (Mo) thin films are used widely as the back contact for CIGS-based solar cells. In this study, the properties of Mo films deposited by DC and RF magnetron sputtering were investigated for their effects on the structural properties of the subsequently sputtered CIGS absorber layer. Mo films were deposited on soda lime glass by DC and RF magnetron sputtering at sputtering powers ranging from 100 to 500 W. The optical, electrical and structural properties of the films were then characterized. The films deposited by RF magnetron sputtering were more reflective, conducting and crystalline than those obtained by DC magnetron sputtering. On the other hand, CIGS/Mo/SLG substrates showed different behaviors with respect to the crystallinity and growth of the CIGS absorber layer. A significant difference in the structural properties was observed after post-annealing with much better performance obtained with Mo films deposited by DC magnetron sputtering.

引用

下载

页码：167 / 172

页数：6

共 50 条

[31] INVESTIGATION INTO THE STRUCTURE AND ELECTRICAL PROPERTIES OF THIN MOLYBDENUM FILMS.
Protsenko, I.E.
Yaremenko, A.V.
Physics of Metals (English Translation of Metallofizika), 1983, 4 (02): : 326 - 332
[32] Selective ablation of thin films in latest generation CIGS solar cells with picosecond pulses
Burn, Andreas
Romano, Valerio
Muralt, Martin
Witte, Reiner
Frei, Bruno
Buecheler, Stephan
Nishiwaki, Shiro
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XVII, 2012, 8243
[33] Properties of high-efficiency CIGS thin-film solar cells
Ramanathan, K
Keane, J
Noufi, R
Conference Record of the Thirty-First IEEE Photovoltaic Specialists Conference - 2005, 2005, : 195 - 198
[34] Silicon nitride films as the diffusion barriers for flexible CIGS thin film solar cells
Qin, Juan
Li, Aimin
Chen, Zhenyi
Zhao, Lei
Zhang, Xiaoli
Shi, Weimin
Wei, Guangpu
SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2011, 7995
[35] Impacts of pulsed-laser assisted deposition on CIGS thin films and solar cells
Nakada, Tokio
Shirakata, Sho
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2011, 95 (06) : 1463 - 1470
[36] Fabrication of CIGS/CZTS Thin Films Solar Cells by Non-vacuum Process
Yoo, Dayoung
Lee, Dongyun
KOREAN JOURNAL OF MATERIALS RESEARCH, 2018, 28 (12): : 748 - 757
[37] Simulation approach for studying the performances of original superstrate CIGS thin films solar cells
Bouchama, I.
Djessas, K.
Djahli, F.
Bouloufa, A.
THIN SOLID FILMS, 2011, 519 (21) : 7280 - 7283
[38] Electrical scanning probe microscopy of thin films for CIGS-based solar cells
Abrahamson, Joel T.
Tosun, B. Selin
Johnson, Forrest
Haugstad, Greg
Campbell, Stephen A.
Aydil, Eray S.
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2013, 245
[39] Growth and device properties of ALD deposited ZnO films for CIGS solar cells
Arepalli, Vinaya Kumar
Lee, Woo-Jung
Chung, Yong-Duck
Kim, Jeha
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 121
[40] Process Parameter Impact on Selective Laser Ablation of Bilayer Molybdenum Thin Films for CIGS Solar Cell Applications
Badgujar, Amol C.
Joshi, Shrikant V.
Dhage, Sanjay R.
MATERIALS FOCUS, 2018, 7 (04) : 556 - 562

← 1 2 3 4 5 →