Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator

被引：4

作者：

Hamza, Abdelli ^{[1
]}

Tsukamoto, Takashiro ^{[1
]}

Tanaka, Shuji ^{[1
]}

机构：

[1] Tohoku Univ, Dept Robot, Sendai, Miyagi 9808579, Japan

来源：

2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020) | 2020年

关键词：

D O I：

10.1109/inertial48129.2020.9090082

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Q-factor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.

引用

页数：4

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