Atomic oxidation of large area epitaxial graphene on 4H-SiC(0001)
被引:7
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作者:
Velez-Fort, E.
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CNRS, LPN, F-91460 Marcoussis, France
Sorbonne Univ Pierre & Marie Curie, CNRS, UMR7590, Inst Mineral & Phys Milieux Condenses, F-75005 Paris, FranceCNRS, LPN, F-91460 Marcoussis, France
Velez-Fort, E.
[1
,2
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Ouerghi, A.
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机构:
CNRS, LPN, F-91460 Marcoussis, FranceCNRS, LPN, F-91460 Marcoussis, France
Ouerghi, A.
[1
]
Silly, M. G.
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机构:
Synchrotron SOLEIL, F-91192 Gif Sur Yvette, FranceCNRS, LPN, F-91460 Marcoussis, France
Silly, M. G.
[3
]
Eddrief, M.
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机构:
CNRS, UMR 7588, Inst NanoSci Paris INSP, F-75005 Paris, France
Univ Paris 06, Sorbonne Univ, UMR 7588, INSP, F-75005 Paris, FranceCNRS, LPN, F-91460 Marcoussis, France
Eddrief, M.
[4
,5
]
Shukla, A.
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机构:
Sorbonne Univ Pierre & Marie Curie, CNRS, UMR7590, Inst Mineral & Phys Milieux Condenses, F-75005 Paris, FranceCNRS, LPN, F-91460 Marcoussis, France
Shukla, A.
[2
]
Sirtti, F.
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机构:
Synchrotron SOLEIL, F-91192 Gif Sur Yvette, FranceCNRS, LPN, F-91460 Marcoussis, France
Sirtti, F.
[3
]
Marangolo, M.
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机构:
CNRS, UMR 7588, Inst NanoSci Paris INSP, F-75005 Paris, France
Univ Paris 06, Sorbonne Univ, UMR 7588, INSP, F-75005 Paris, FranceCNRS, LPN, F-91460 Marcoussis, France
Marangolo, M.
[4
,5
]
机构:
[1] CNRS, LPN, F-91460 Marcoussis, France
[2] Sorbonne Univ Pierre & Marie Curie, CNRS, UMR7590, Inst Mineral & Phys Milieux Condenses, F-75005 Paris, France
[3] Synchrotron SOLEIL, F-91192 Gif Sur Yvette, France
[4] CNRS, UMR 7588, Inst NanoSci Paris INSP, F-75005 Paris, France
[5] Univ Paris 06, Sorbonne Univ, UMR 7588, INSP, F-75005 Paris, France
Structural and electronic properties of epitaxial graphene on 4H-SiC were studied before and after an atomic oxidation process. X-ray photoemission spectroscopy indicates that oxygen penetrates into the substrate and decouples a part of the interface layer. Raman spectroscopy demonstrates the increase of defects due to the presence of oxygen. Interestingly, we observed on the near edge x-ray absorption fine structure spectra a splitting of the pi* peak into two distinct resonances centered at 284.7 and 285.2 eV. This double structure smears out after the oxidation process and permits to probe the interface architecture between graphene and the substrate. (C) 2014 AIP Publishing LLC.
机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Zhao, Siqi
Wang, Jiulong
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Wang, Jiulong
Yan, Guoguo
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Yan, Guoguo
Shen, Zhanwei
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Shen, Zhanwei
Zhao, Wanshun
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Zhao, Wanshun
Wang, Lei
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Wang, Lei
Liu, Xingfang
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Liu, Xingfang
Sun, Guosheng
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Sun, Guosheng
Zeng, Yiping
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机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
机构:
Xianyang Normal Univ, Sch Phys & Elect Engn, Xianyang 712000, Peoples R ChinaXianyang Normal Univ, Sch Phys & Elect Engn, Xianyang 712000, Peoples R China
Wang Dang-Chao
Zhang Yu-Ming
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机构:
Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXianyang Normal Univ, Sch Phys & Elect Engn, Xianyang 712000, Peoples R China