共 50 条
- [1] Fabrication & testing of integrated ferroelectric capacitors [J]. 1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 63 - 66
- [4] INTEGRATED CIRCUIT MASK FABRICATION [J]. SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY, 1966, 9 (08): : 23 - &
- [5] Study on integrated ferroelectric capacitors applied to FRAM [J]. Yadian Yu Shengguang, 2008, 1 (42-44):
- [9] Fabrication options for thin film integrated capacitors [J]. 2000 HD INTERNATIONAL CONFERENCE ON HIGH-DENSITY INTERCONNECT AND SYSTEMS PACKAGING, 2000, 4217 : 330 - 335