Nonlinear Model Predictive Control of the Czochralski Process

被引：16
|
作者：
Rahmanpour, Parsa [1 ]
Saelid, Steinar [2 ]
Hovd, Morten [1 ,3 ]
Gronning, Oddvar [2 ]
Jomaa, Moez
机构：
[1] Norwegian Univ Sci & Technol NTNU, Dept Engn Cybernet, NO-7491 Trondheim, Norway
[2] Prediktor AS, Fredrikstad, Norway
[3] SINTEF, Oslo, Norway
来源：
IFAC PAPERSONLINE | 2016年 / 49卷 / 20期
关键词：
CRYSTAL-GROWTH;
D O I：
10.1016/j.ifacol.2016.10.107
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Commercially, the Czochralski process is the most commonly applied method for production of monocrystalline silicon for semiconductor and solar cell applications. The process has traditionally been controlled using nested single-loop controllers. Due to the complex and nonlinear nature of the Cz process, Lids paper considers model-based control of the process with application of nonlinear model predictive controllers. (C) 2016, IFAC (International Federation Control) Hosting By Elsevier Ltd. All rights reserverd.
引用
收藏
页码：120 / 125
页数：6
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