Nonlinear Model Predictive Control of the Czochralski Process

被引：16

作者：

Rahmanpour, Parsa ^{[1
]}

Saelid, Steinar ^{[2
]}

Hovd, Morten ^{[1
,3
]}

Gronning, Oddvar ^{[2
]}

Jomaa, Moez

机构：

[1] Norwegian Univ Sci & Technol NTNU, Dept Engn Cybernet, NO-7491 Trondheim, Norway

[2] Prediktor AS, Fredrikstad, Norway

[3] SINTEF, Oslo, Norway

来源：

IFAC PAPERSONLINE | 2016年 / 49卷 / 20期

关键词：

CRYSTAL-GROWTH;

D O I：

10.1016/j.ifacol.2016.10.107

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Commercially, the Czochralski process is the most commonly applied method for production of monocrystalline silicon for semiconductor and solar cell applications. The process has traditionally been controlled using nested single-loop controllers. Due to the complex and nonlinear nature of the Cz process, Lids paper considers model-based control of the process with application of nonlinear model predictive controllers. (C) 2016, IFAC (International Federation Control) Hosting By Elsevier Ltd. All rights reserverd.

引用

页码：120 / 125

页数：6

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