The effects of mechanical properties of thin films on nano-indentation data: Finite element analysis

Mechanical properties of thin films are commonly determined using nano or ultra-microhardness indentation. Understanding the relationship of the measured data and the mechanical properties of:he indented materials is of importance in order to obtain reliable mechanical properties, particularly of the thin films. Using finite element analysis, the effects of the elastic modulus, yield strength, and strain hardening of the film on indertation data are analysed and discussed for the indentation with 2, 8, 10 and 50 mu m radius indenters. Elastic modulus of the films on a single ductile substrate shows relatively small influence whereas yield strength and strain hardening are found to have significant effect on the measured data. (C) 1997 Published by Elsevier Science B.V.