Nano and Micro Indentation and Scratch Tests of Mechanical Properties of Thin Films

被引：1
|
作者：
Gitis, Norm V. [1 ]
Hermann, Ilja [1 ]
Kuiry, Suresh [1 ]
Xiao, Jun [1 ]
机构：
[1] CETR Inc, Campbell, CA 95008 USA
来源：
ADVANCED TRIBOLOGY | 2009年
关键词：
Thin films; Hardness; Indentation; Scratch;
D O I：
10.1007/978-3-642-03653-8_152
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Experimental comparison of common nano and micro scales for hardness evaluation has been performed on metal samples and discussed in details. Instrumented indentation was found advantageous in both repeatability and a number of measured parameters over classical hardness methods for metals, while sclerometry was advantageous for ultra-thin films. Perform tests at various well-controlled sliding-to-rolling, speed-to-load and temperature levels
引用
收藏
页码：489 / 490
页数：2
相关论文
共 50 条
  • [1] Nano and micro indentation and scratch tests of mechanical properties of metals
    Gitis, Norm
    Hermann, Iija
    Kulry, Suresh
    Khosla, Vishal
    PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE, PTS A AND B, 2008, : 775 - 776
  • [2] Mechanical properties of biomaterials determined by nano-indentation and nano-scratch tests
    Karimzadeh, A.
    Ayatollahi, M.R.
    Solid Mechanics and its Applications, 2014, 203 : 189 - 207
  • [3] Investigation of mechanical properties of granular γ-alumina using experimental nano indentation and nano scratch tests
    Mojtaba Jahanshahi
    Roozbeh Mofidian
    Seyed Sharafodin Hosseini
    Mehdi Miansari
    SN Applied Sciences, 2023, 5
  • [4] Investigation of mechanical properties of granular γ-alumina using experimental nano indentation and nano scratch tests
    Jahanshahi, Mojtaba
    Mofidian, Roozbeh
    Hosseini, Seyed Sharafodin
    Miansari, Mehdi
    SN APPLIED SCIENCES, 2023, 5 (06):
  • [5] Nano indentation inspection of the mechanical properties of gold nitride thin films
    Verdyan, A.
    Soifer, Ya. M.
    Azoulay, J.
    Martino, M.
    Caricato, A. P.
    Tunno, T.
    Romano, F.
    Valerini, D.
    3RD INT CONF ON CYBERNETICS AND INFORMATION TECHNOLOGIES, SYSTEMS, AND APPLICAT/4TH INT CONF ON COMPUTING, COMMUNICATIONS AND CONTROL TECHNOLOGIES, VOL 1, 2006, : 52 - +
  • [6] Relationship between mechanical properties of thin nitride-based films and their behaviour in nano-scratch tests
    Beake, B. D.
    Vishnyakov, V. M.
    Harris, A. J.
    TRIBOLOGY INTERNATIONAL, 2011, 44 (04) : 468 - 475
  • [7] Mechanical properties of metallic thin films: Tensile tests vs. indentation tests
    Zhang, N
    Xie, C
    Tong, W
    MICRO- AND NANOSYSTEMS, 2004, 782 : 377 - 382
  • [8] Determination of the mechanical properties of metallic thin films and substrates from indentation tests
    Tunvisut, K
    Busso, EP
    O'Dowd, NP
    Brantner, HP
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2002, 82 (10): : 2013 - 2029
  • [9] Atomic force microscopy nano-indentation for testing mechanical properties in thin films
    Roa, Simon
    Haberkorn, N.
    Sirena, Martin
    MATERIALS TODAY-PROCEEDINGS, 2019, 14 : 113 - 116
  • [10] Finite element modeling and simulations on indentation and scratch tests on thin films: effects of prestress
    Biao Feng
    Zhen Liu
    MRS Communications, 2019, 9 : 756 - 763
12345