Total internal reflection ellipsometry - A tool for in-situ corrosion studies

被引：0
|
作者：
Poksinski, M [1 ]
Dzuho, H [1 ]
Arwin, H [1 ]
机构：
[1] Linkoping Univ, Dept Phys & Measurement Technol, Lab Appl Opt, SE-58183 Linkoping, Sweden
来源：
CORROSION AND CORROSION PROTECTION | 2001年 / 2001卷 / 22期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
A new measurement technique combining ellipsometry and total internal reflection is presented. This technique is called total internal reflection ellipsometry and opens new possibilities for measurements of thickness and roughness changes on metal surfaces. Results from corrosion detection on thin copper films are presented. Also a schematic design of the instrument used in total internal reflection ellipsometry is included. The main advantage compared to normal ellipsometry is that measurements can be done in opaque ambients due to internal reflection.
引用
收藏
页码：1002 / 1008
页数：7
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