Lead zirconate titanate deposited on RuO2 by pulsed laser ablation

被引：3
|
作者：
DeBenedittis, A
DiCristoforo, A
Majni, G
Mengucci, P
Watts, BE
Leccabue, F
Vasco, E
Diodati, A
机构：
[1] UNIV ANCONA, DIPARTIMENTO SCI MAT & TERRA, INFM, I-60131 ANCONA, ITALY
[2] CNR, INST MASPEC, I-43100 PARMA, ITALY
来源：
APPLIED SURFACE SCIENCE | 1997年 / 109卷
关键词：
D O I：
10.1016/S0169-4332(96)00625-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A systematic study of the phase distribution in PbZr0.52Ti0.48O3 films deposited, using a XeCl excimer laser, on two electrodes Si/RuO2 and Si/Ti/RuO2 has been carried out. In order to refine the growth parameters, the substrate temperature was changed in the range 600-700 degrees C at two different values of the laser fluence, 3 and 6 J/cm(2). The deposited films were characterized by grazing angle X-ray diffraction (GAD), scanning (SEM) and transmission (TEM) electron microscopy, energy dispersive spectroscopy (EDS) and measurements of the hysteresis loop by a modified Sawyer-Tower circuit. Results showed that at high fluence the perovskite phase decreases as the substrate temperature increases and that the Ti favours the nucleation of the perovskite.
引用
收藏
页码：299 / 304
页数：6
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