Lead zirconate titanate deposited on RuO2 by pulsed laser ablation

被引：3
|
作者：
DeBenedittis, A
DiCristoforo, A
Majni, G
Mengucci, P
Watts, BE
Leccabue, F
Vasco, E
Diodati, A
机构：
[1] UNIV ANCONA, DIPARTIMENTO SCI MAT & TERRA, INFM, I-60131 ANCONA, ITALY
[2] CNR, INST MASPEC, I-43100 PARMA, ITALY
来源：
APPLIED SURFACE SCIENCE | 1997年 / 109卷
关键词：
D O I：
10.1016/S0169-4332(96)00625-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A systematic study of the phase distribution in PbZr0.52Ti0.48O3 films deposited, using a XeCl excimer laser, on two electrodes Si/RuO2 and Si/Ti/RuO2 has been carried out. In order to refine the growth parameters, the substrate temperature was changed in the range 600-700 degrees C at two different values of the laser fluence, 3 and 6 J/cm(2). The deposited films were characterized by grazing angle X-ray diffraction (GAD), scanning (SEM) and transmission (TEM) electron microscopy, energy dispersive spectroscopy (EDS) and measurements of the hysteresis loop by a modified Sawyer-Tower circuit. Results showed that at high fluence the perovskite phase decreases as the substrate temperature increases and that the Ti favours the nucleation of the perovskite.
引用
收藏
页码：299 / 304
页数：6
相关论文
共 50 条
  • [31] Improved fatigue property of hafnium substitute lead zirconate titanate deposited by pulse laser deposition
    Zhipeng Wu
    Jun Zhu
    Xingpeng Liu
    [J]. Journal of Materials Science: Materials in Electronics, 2017, 28 : 1819 - 1823
  • [32] Preparation of Pb(Ti,Zr)O-3/RuO2 multilayers in situ by pulsed laser ablation deposition
    Iembo, A
    Fuso, F
    Allegrini, M
    Arimondo, E
    Debenedittis, A
    DiCristoforo, A
    Mengucci, P
    Watts, BE
    Leccabue, F
    [J]. INTEGRATED FERROELECTRICS, 1997, 18 (1-4) : 397 - 404
  • [33] Pulsed excimer laser deposition and characterization of ferroelectric lead-zirconate-titanate thin films
    陈逸清
    郑立荣
    张顺开
    林成鲁
    邹世昌
    [J]. Science Bulletin, 1995, (04) : 340 - 344
  • [34] Thickness dependence of electrical properties in (001) oriented lead zirconate titanate films by laser ablation
    Zhu, T. J.
    Lu, L.
    Lai, M. O.
    Soh, A. K.
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2007, 138 (01): : 51 - 54
  • [35] Crystallization of lead zirconate titanate films by laser annealing
    D. N. Khmelenin
    O. M. Zhigalina
    K. A. Vorotilov
    I. G. Lebo
    [J]. Physics of the Solid State, 2012, 54 : 999 - 1001
  • [36] Crystallization of lead zirconate titanate films by laser annealing
    Khmelenin, D. N.
    Zhigalina, O. M.
    Vorotilov, K. A.
    Lebo, I. G.
    [J]. PHYSICS OF THE SOLID STATE, 2012, 54 (05) : 999 - 1001
  • [37] Structural characterization of lead metaniobate thin films deposited by pulsed laser ablation
    Cardoso, F.
    Almeida, B. G.
    Caldelas, P.
    Mendes, J. A.
    [J]. ADVANCED MATERIALS FORUM III, PTS 1 AND 2, 2006, 514-516 : 207 - 211
  • [38] Preparation and characterization of excimer laser ablation derived lead zirconate titanate thin films for micro actuators
    Wang, ZJ
    Maeda, R
    Kokawa, H
    [J]. DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001, 2001, 4408 : 494 - 501
  • [39] INTRINSIC RESPUTTERING IN PULSED-LASER DEPOSITION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS
    HAU, SK
    WONG, KH
    CHAN, PW
    CHOY, CL
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (02) : 245 - 247
  • [40] Study of pulsed laser deposition of RuO2 and SrRuO3 thin films
    X. Fang
    T. Kobayashi
    [J]. Applied Physics A, 1999, 69 : S587 - S590
12345