Surface Acoustic Wave Sensors for Temperature and Strain Measurements

被引：14

作者：

Yan, Yang ^{[1
]}

Wang, Yudong ^{[1
]}

Carka, Dorinaria ^{[1
]}

Li, Fang ^{[1
]}

机构：

[1] New York Inst Technol, Dept Mech Engn, Old Westbury, NY 11568 USA

来源：

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年

关键词：

SAW; TCD; SCD; FEM;

D O I：

10.1109/ius46767.2020.9251505

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Surface acoustic wave (SAW) technology has received considerable attention for harsh environment applications. The ultimate goal of our research is to develop a SAW sensor system for temperature and pressure sensing in the cryogenic environment. In this research, we performed a Finite Element (FE) analysis to simulate the temperature sensitivity of the 128o YX-cut Lithium Niobate (LiNbO3)-based SAW sensor using COMSOL Multiphysics. The fabricated SAW sensors were applied to measure the temperature from 30 degrees C to 80 degrees C and the strain at room temperature. The results have shown that the temperature coefficient of the delay (TCD) at room temperature is around 74.4 ppm/degrees C. The measured TCD of the temperature at room temperature matches the simulation result, which is 72.37 ppm/degrees C. The measured strain coefficient of delay (SCD) is 0.38ppm/mu epsilon at room temperature.

引用

页数：5

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