Wireless Temperature Measurements above 500°C using Surface Acoustic Wave Sensors

被引：8

作者：

Francois, B. ^{[1
]}

Sakharov, S. ^{[2
]}

Droit, C. ^{[3
]}

Davis, Z. ^{[4
]}

Richter, D. ^{[5
]}

Fritze, H. ^{[5
]}

Martin, G. ^{[1
]}

Friedt, J. M. ^{[3
]}

Plessky, V. P. ^{[1
]}

Brueckner, G. ^{[6
]}

Mayer, E. ^{[7
]}

Reindl, L. ^{[7
]}

Karachalios, T. ^{[8
]}

Schiffers, W. ^{[9
]}

Roux, C. ^{[10
]}

Ballandras, S. ^{[1
]}

机构：

[1] UMR 6174 CNRS UFC ENSMM UTBM, FEMTO ST, Time & Frequency Dept, Besancon, France

[2] OAO, FOMOS Mat, Moscow, Russia

[3] SENSEOR SAS, Besancon, France

[4] Danish Technol Inst, Lyngby, Denmark

[5] Tech Univ Clausthal, Clausthal Zellerfeld, Germany

[6] GVR Trade, Bevaix, Switzerland

[7] Univ Freiburg, IMTEK, Freiburg, Germany

[8] Nanothinx S A, Patras, Greece

[9] Rolls Royce, Derby, England

[10] Inst Pierre Vernier, Besancon, France

来源：

26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷

关键词：

Surface acoustic wave; passive; high temperature; sensor; langasite; quartz; reader;

D O I：

10.1016/j.proeng.2012.09.374

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Surface acoustic wave (SAW) devices can operate without on-board power supply using a dedicated interrogation unit. Using appropriate design considerations, these devices are sensitive to parametric perturbations including temperature, pressure, strain, etc. The work reported in this paper has been developed in the SAWHOT (NMP Europa/Russia) project frame, consisting in measuring temperature in harsh environments like high temperature furnace, airplane engines or chemical reactors. Temperature sensors operating from room temperature up to 700 degrees C are particularly focused here. Below 500 degrees C, the use of a Quartz-based differential SAW sensor is demonstrated, allowing for accurate measurements with an effective robustness to environmental conditions. Above 500 degrees C , Langasite (LGS)-based SAW resonators are used, allowing for temperature measurements up to 700 degrees C during several tens of hours. (c) 2012 Elsevier Ltd...Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.

引用

页码：1227 / 1230

页数：4

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