Strain Transfer Analysis of Integrated Surface Acoustic Wave Sensors

被引:8
|
作者
Hempel, Jochen [1 ]
Anees, Sohaib [1 ]
Zukowski, Elena [2 ]
Berndt, Michael [2 ]
Wilde, Juergen [2 ]
Reindl, Leonhard M. [1 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn, Lab Elect Instrumentat, D-79106 Freiburg, Germany
[2] Univ Freiburg, Dept Microsyst Engn, Lab Assembly & Packaging Technol, D-79106 Freiburg, Germany
关键词
SENSITIVITY;
D O I
10.1115/1.4026437
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a strain transfer investigation for Surface Acoustic Wave ( SAW) strain sensors. For evaluation, a SAW strain sensor is assembled with a pretested bond material for potentially high strain transfer on a test holder. The setup is stressed with an axially homogeneous strain up to 500 ppm. The strain transfer ratio is computed from the applied load, the reference measurements with foil strain gauge, and the measured SAW strain sensor signal. The strain transfer performance of the bond material is also investigated with respect to the temperature dependency in the range between 22 degrees C and 85 degrees C. At these elevated temperatures an average strain transfer ratio of 0.6066 +/- 0.7% was measured. Mechanical load cycling tests up to 1000 cycles are used for the evaluation of the elastic fatigue of the bond material. The effects of mechanical load cycling and aging of the bond layer are analyzed with the SAW strain sensor response. After 1000 mechanical load cycles, the transferred strain into the SAW strain sensor is 0.5826 +/- 0.153%. Finally, the experimental results are compared with the results of a 3D FEM simulation which are deviating by less than 10%.
引用
收藏
页数:6
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